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mchequip:semzeiss

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Table of Contents

FIXME

The ZEISS Σigma is a FESEM (field emmission scanning electron microscope) owned by the IEHK.

Staff

IEHK MCh
Person in charge Hannah Schwich Friederike Wittmers
Operator Wieslaw Tupiec
+ User Adrian Rüßkamp Marcus Hans, Ole Achenbach, Holger Rueß

Technical specifications

FESEM

Zeiss ΣIGMA
Electron Source Schottky Thermal Field Emitter
Detectors In-lens, SE, BSE
Resolution @ 1 kV 2.8 nm @ 1 kV, 1.5 nm @ 15 kV
Acceleration Voltage 0.2 - 30 kV
Magnification 10x - 1,000,000x
Probe Current 4 pA - 100 nA Option

EDS

Oxford Instruments X-MaxN 50
Detector SDD (Silicon Drift Detector)
Detector size 50 mm²

EBSD

Detector

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mchequip/semzeiss.1721032073.txt.gz · Last modified: 2024/07/15 10:27 by fecik