mchequip:afm
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Table of Contents
JSPM-4500A UHV AFM
MCh's AFM/STM-system is a JSPM-4500A “Ultrahigh Vacuum Atomic Force Microscope” made by JEOL. It consists out of three chambers: exchange, sample cleaning and observation chamber.
Technical Specifications
General | JSPM-4500 | |
---|---|---|
Vacuum | Exchange chamber | 1*10-5 Pa |
Sample cleaning | 5*10-7 Pa (down to 10-7 Pa) | |
Observation chamber | < 3*10-8 Pa | |
Pumping system | Exchange chamber | oil rotary pump + turbo molecular pump |
Treatment chamber | sputter ion pump (SIP2) / Ti sublimation pump (TSP) | |
Observation chamber | sputter ion pump (SIP1) / Ti sublimation pump (TSP) | |
Vacuum gauges | Exchange chamber | Pirani/Penning gauge |
Treatment chamber | Pirani/Penning gauge | |
Observation chamber | nude filament (ion) gauge |
Detection signal | JSPM-4500 |
---|---|
AFM contact mode | 10 pN up to 10nN |
Tunnelling current (STM mode) | 50 pA up to 1µA |
Currently, the AFM/STM has not been used for a while. An AFM/STM-training is considered for some MCh staff.
mchequip/afm.1721032019.txt.gz · Last modified: 2024/07/15 10:26 by fecik