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Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.

• MCh ID no.: 4.2_01
• Nickname: Thor
• Inventory number: (fill only if known)
• Person in charge: Stanislav Mráz

• Built:
• No. of targets:
• Substrate bias:
• HPPMS compatible:

• equipment 1
• equipment 2

Please write down a short MCh User manual or upload scans.

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