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mchequip:4.1_08

Dino

FIXME

Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.

  • MCh ID no.: 4.1_08
  • Nickname: Dino
  • Inventory number: (fill only if known)
  • Person in charge: Stanislav Mráz

Machine data

  • Built:
  • No. of targets:
  • Substrate bias:
  • HPPMS compatible:

Standard equipment

  • equipment 1
  • equipment 2

Documentation

Current documentation (as of September 2024) can be found on the institute's file server:

K:\Organization\General organization data\MCh Infrastructure\Manuals and information\EQUIPMENT MANUALS\Hippo

See current status and issues
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mchequip/4.1_08.txt · Last modified: 2024/09/03 15:28 by fecik