This is an old revision of the document!
Jarvis
Jarvis is a self-manufactured PVD system designed for the synthesis of thickness graded multilayer thin films. The most unique features are the fast acting target shutter. An actuation time (from open to close or from close to open) of 200ms enables the synthesis of thin multilayers down to monolayer thicknesses. Two of the targets are aligned 45° relative to the substrate normal, which enables the growth of thickness graded films. The third target is aligned head on to the substrate. The main chamber is equipped with a self-build lamp heater, which is mounted on a former 2’’ Besteck substrate manipulator. A load lock system allows for efficient, clean and high throughput synthesis.
- MCh ID no.: 4.1_07
- Nickname: Jarvis
- Person in charge (1st): Friederike Wittmers
- Person in charge (2nd): Seyedmohammad Shayestehaminzadeh
Machine data
- Built: 2015
- No. of targets: 3
- Substrate Bias: yes
- HPPMS compatible: yes
Standard equipment
- Old Attis chamber as a load lock system
- Shutter MBE
- Self-build lamp heater (intended max T=1000°C)
- Three self-build 2’’ Magnetrons version No[]
- Transfer rod version No.[]
- NO standard power generator available (Jan 2016)
- compatible with MELEC Pulse Generators
- compatible with PMP1 generators from Kybele
- Main chamber Turbovac 350i Qerlikon Leybold
- Main chamber Trivac D4B Oerlikon Leybold
- Load lock Turbovac 151 Oerlikon Leybold
- Load lock Ilmvac P6Z
- Main chamber and load lock cold cathode PTR 90 Oerlikon Leybold
- Main chamber capacitance pressure gauge CTR 101 range 0.1 Torr Oerlikon Leybold
- Main chamber pre vacuum Pirani pressure gauge TTR 91N Oerlikon Leybold
Documentation
Shutter documentation…
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:shutter_control_unit_scu_24v_2102875.pdf
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:shutter_control_unit_scu_24v_2102975.pdf
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:shutter_drive_unit.pdf
Heater documentation…
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:heater_documentation.pdf
Magnetron drawings version No….
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:magnetron_drawings.pdf
Transfer rod drawings version No….
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:transfer_rod_drawings.pdf
Chamber drawings
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:chamber_quality_assessment.pdf
Pumps…
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:turbovac_gebrauchsanleitung.pdf
https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:turbovac_operating_instructions.pdf