mchequip:4.1_06
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Garfield
Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber.
MCh ID no.: 03_202_4
Nickname: Garfield
Person in charge: Bastian Stelzer
Machine data
Built: …
Max no. of targets: 3
Substrate Bias: yes
HPPMS compatible: yes
Standard equipment
Main Chamber Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)
Main Chamber Turbomolecular pump (Qerlikon Leybold Turbovac TMP 361 )
Load Lock Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)
Load Lock Turbomolecular pump (Pfeiffer Vacuum TPU 240)
Documentation
MCh User manual Cathode user manuals
mchequip/4.1_06.1725357757.txt.gz · Last modified: 2024/09/03 12:02 by fecik