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Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber.

MCh ID no.: 03_202_4
Nickname: Garfield
Person in charge: Bastian Stelzer

Built: …
Max no. of targets: 3
Substrate Bias: yes
HPPMS compatible: yes

Main Chamber Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)
Main Chamber Turbomolecular pump (Qerlikon Leybold Turbovac TMP 361 )
Load Lock Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)
Load Lock Turbomolecular pump (Pfeiffer Vacuum TPU 240)

MCh User manual Cathode user manuals

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