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mchequip:4.1_05

Flipper

FIXME

Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross.

  • MCh ID no.: 03_202_3
  • Nickname: Flipper
  • Inventory number: (fill only if known)
  • Person in charge: Stanislav Mráz

Machine data

  • Built:
  • No. of targets: 2
  • Substrate bias: yes
  • HPPMS compatible: yes

Flipper

Standard equipment

  • Rotary-vane: Edwards E2M28
  • Turbomolecular pump: Pfeiffer Vacuum TPU 240

Documentation

Please write down a short MCh user manual or upload corresponding scans.

See current status and issues
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mchequip/4.1_05.txt · Last modified: 2024/09/03 14:38 by fecik