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Nike is a thin film stress measurement system with multi-beam optical sensor using wafer curvature method. Both in-situ (vacuum annealing) and ex-situ (room temperature) operation possible.

• MCh ID no.: 03_202_02
• Nickname: Nike ¹⁾
• Inventory number: (fill only if known)
• Person in charge: Marcus Hans

• Built: 2010
• Last modified: 2015
• possible to transform to deposition chamber
• MOS independently detachable (possible to adopt to other deposition chambers)

• kSA MOS (Multi-beam Optical Sensor)
• Turbo molecular pump: Pfeiffer Balzers TPU 240
• Rotary pump: AEG AMEB 7EY4 R3N1
• Pressure gauge: MKS Baratron TYPE 127
• Heater control unit: Eurotherm 2416
• Generator: TDK-Lambda GEN 150-16
• Bestec 3'' Carbon-BN sample holder/heater
• Desktop with kSA MOS software

• MOS manual
• Eurotherm 2416 manual
• TDK-Lambda GEN 150-16 manual

• Age requirement: 18+
• Laser safety training required (contact Bernd Conrad)

See current status and issues
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