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Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its “sister machine” Jarvis, they are the largest and most versatile lab deposition machines and, thus, the “working horses” at MCh.

• MCh ID no.: 4.1_01
• Nickname: Kybele
• Inventory number: (fill only if known)
• Person in charge: Clio Azina, Stanislav Mráz

• Built: 2002
• No. of targets: 4
• Substrate bias: yes
• HPPMS compatible: yes

• MELEC pulse generators
• Mass energy analyzer
• SURFACE sample holder/heater

Please write down a short MCh user manual or upload corresponding scans.

MCh User manual
Cathode user manuals

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