Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its “sister machine” Jarvis they are the largest and most versatile lab deposition machines and, thus, the “working horses” at MCh.

• MCh ID no.: 4.1_01
• Nickname: Kybele
• Person in charge: Volker Schnabel

• Built: 2002
• No. of targets: 4
• Substrate Bias: yes
• HPPMS compatible: yes

• MELEC Pulse Generators
• Mass Energy Analyzer
• SURFACE Sample holder/heater

MCh User manual Cathode user manuals