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Template: Name of the chamber

Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.

MCh ID no.:
Nickname:
Person in charge:

Machine data

Built:
No. of targets:
Substrate Bias:
HPPMS compatible:

Standard equipment

Please list here the standard equipment used for this device. The given example below is made for Kybele.

MELEC Pulse Generators
Mass Energy Analyzer
SURFACE Sample holder/heater

Documentation

Please write down a short MCh User manual or upload scans.

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