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Table of Contents
Jarvis
Jarvis is a self-manufactured PVD system designed for the synthesis of thickness graded multilayer thin films. The most unique features are the fast acting target shutter. An actuation time (from open to close or from close to open) of 200ms enables the synthesis of thin multilayers down to monolayer thicknesses. Two of the targets are aligned 45° relative to the substrate normal, which enables the growth of thickness graded films. The third target is aligned head on to the substrate. The main chamber is equipped with a self-build lamp heater, which is mounted on a former 2’’ Besteck substrate manipulator. A load lock system allows for efficient, clean and high throughput synthesis.
- MCh ID no.: 4.1_03
- Nickname: Jarvis
- Person in charge: Volker Schnabel
Machine data
- Built: 2015
- No. of targets: 3
- Substrate Bias: yes
- HPPMS compatible: yes
Standard equipment
- Shutter …
- Self-build lamp heater (intended max T=1000°C)
- Self-build 2’’ Magnetrons version No….
- Transfer rod version No.
- NO standard power generator available (Jan 2016) MELEC Pulse Generators
- compatible with MELEC Pulse Generators
- compatible with PMP1 generators from Kybele
- compatible with other standard DC and RF generators
- Pumps ….
Documentation
Shutter documentation…
Heater documentation…
Magnetron drawings version No….
Transfer rod drawings version No….