blog:4.1_06
This is an old revision of the document!
Table of Contents
Garfield
Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber.
MCh ID no.:
Nickname: Garfield
Person in charge: Jan-Ole Achenbach
Machine data
Built: …
Max no. of targets: 3
Substrate Bias: yes
HPPMS compatible: yes
Standard equipment
Load Lock
Load Lock Turbomolecular pump (Pfeiffer Vacuum TPU 240)
Documentation
MCh User manual Cathode user manuals
blog/4.1_06.1453897997.txt.gz · Last modified: 2016/01/27 11:33 (external edit)