blog:4.1_06
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Table of Contents
Garfield
Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber.
MCh ID no.:
Nickname: Garfield
Person in charge: Jan-Ole Achenbach
Machine data
Built: …
Max no. of targets: 3
Substrate Bias: yes
HPPMS compatible: yes
Standard equipment
SURFACE Sample holder/heater
Documentation
MCh User manual Cathode user manuals
blog/4.1_06.1452755892.txt.gz · Last modified: 2016/01/14 06:18 (external edit)