blog:4.1_06
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Garfield is a self-manufactured PVD system consisting of two parts, a deposition and chamber and a loadlock.
MCh ID no.: Nickname: Garfield Person in charge: Jan-Ole Achenbach
Machine data
Built: … Max no. of targets: 3 Substrate Bias: yes HPPMS compatible: yes
Standard equipment
MELEC Pulse Generators SURFACE Sample holder/heater
Documentation
MCh User manual Cathode user manuals
blog/4.1_06.1452163787.txt.gz · Last modified: 2016/01/07 09:49 (external edit)