blog:4.1_05
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Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross.
MCh ID no.:
Nickname: Flipper
Person in charge: Jan-Ole Achenbach
Machine data
Built: …
Max no. of targets: 2
Substrate Bias: yes
HPPMS compatible: yes
Standard equipment
Rotary-vane (Edwards E2M28)
Turbomolecular punm (Pfeiffer Vacuum TPU 240)
Documentation
MCh User manual Cathode user manuals
blog/4.1_05.1452755403.txt.gz · Last modified: 2016/01/14 06:10 (external edit)