Thor
Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.
- MCh ID no.: 4.2_01
- Nickname: Thor
- Inventory number: (fill only if known)
- Person in charge: Stanislav Mráz
Machine data
- Built:
- No. of targets:
- Substrate bias:
- HPPMS compatible:
Standard equipment
- equipment 1
- equipment 2
Documentation
Please write down a short MCh User manual or upload scans.