Dino
Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.
- MCh ID no.: 4.1_08
- Nickname: Dino
- Inventory number: (fill only if known)
- Person in charge: Stanislav Mráz
Machine data
- Built:
- No. of targets:
- Substrate bias:
- HPPMS compatible:
Standard equipment
- equipment 1
- equipment 2
Documentation
Current documentation (as of September 2024) can be found on the institute's file server:
K:\Organization\General organization data\MCh Infrastructure\Manuals and information\EQUIPMENT MANUALS\Hippo