Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a load-lock chamber.

• MCh ID no.: 03_202_4
• Nickname: Garfield
• Inventory number: (fill only if known)
• Person in charge: Clio Azina

• Built:
• No. of targets: 3
• Substrate bias: yes
• HPPMS compatible: yes

• Main chamber:
  • Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
  • Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361
• Load-lock chamber:
  • Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
  • Turbomolecular pump: Pfeiffer Vacuum TPU 240

Please write down a short MCh user manual or upload corresponding scans.

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