Flipper
Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross.
- MCh ID no.: 03_202_3
- Nickname: Flipper
- Inventory number: (fill only if known)
- Person in charge: Stanislav Mráz
Machine data
- Built:
- No. of targets: 2
- Substrate bias: yes
- HPPMS compatible: yes
Standard equipment
- Rotary-vane: Edwards E2M28
- Turbomolecular pump: Pfeiffer Vacuum TPU 240
Documentation
Please write down a short MCh user manual or upload corresponding scans.