A short description of the chamber including the kind of deposition system, the origin and use.

• MCh ID no.: 4.1_0.2
• Nickname:
• Inventory number: (fill only if known)
• Person in charge:

• Built:
• No. of targets:
• Substrate Bias:
• HPPMS compatible:

List of standard equipment used for this device.

• equipment 1
• equipment 2

Please write down a short MCh user manual or upload corresponding scans.

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