Kybele
Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its “sister machine” Jarvis, they are the largest and most versatile lab deposition machines and, thus, the “working horses” at MCh.
- MCh ID no.: 4.1_01
- Nickname: Kybele
- Inventory number: (fill only if known)
- Person in charge: Clio Azina, Stanislav Mráz
Instrument data
- Built: 2002
- No. of targets: 4
- Substrate bias: yes
- HPPMS compatible: yes
Standard equipment
- MELEC pulse generators
- Mass energy analyzer
- SURFACE sample holder/heater
Documentation
Please write down a short MCh user manual or upload corresponding scans.
MCh User manual
Cathode user manuals