Instruction to create a wiki - article for deposition chambers

Please use the following structure to describe the deposition chamber, which you are responsible for. To copy and paste click the “Edit”- Button. Then you have access to the template.

Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.

• MCh ID no.:
• Nickname:
• Person in charge:

• Built:
• No. of targets:
• Substrate Bias:
• HPPMS compatible:

Please list here the standard equipment used for this device. The given example below is made for Kybele.

• MELEC Pulse Generators
• Mass Energy Analyzer
• SURFACE Sample holder/heater

Please write down a short MCh User manual or upload scans.