===== Thor ===== FIXME Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points. * MCh ID no.: 4.2_01 * Nickname: Thor * Inventory number: (fill only if known) * Person in charge: Stanislav Mráz === Machine data === * Built: * No. of targets: * Substrate bias: * HPPMS compatible: {{ mchequip:thor.jpeg?nolink&0x350 |Thor}} === Standard equipment === * equipment 1 * equipment 2 === Documentation === Please write down a short MCh User manual or upload scans. [[mchequip:status|See current status and issues]] \\ [[mchequip:deposition|Back to the list]]