===== Nike =====

FIXME

Nike is a thin film stress measurement system with multi-beam optical sensor using wafer curvature method. Both //in-situ// (vacuum annealing) and //ex-situ// (room temperature) operation possible. 

  * MCh ID no.: 03_202_02
  * Nickname: Nike ((the Winged Goddess of Victory))
  * Inventory number: (fill only if known)
  * Person in charge: Marcus Hans 

=== Machine data ===

  * Built: 2010
  * Last modified: 2015
  * possible to transform to deposition chamber
  * MOS independently detachable (possible to adopt to other deposition chambers)

{{ mchequip:nike.jpeg?nolink&0x350 |Nike}}

=== Standard equipment ===

  * kSA MOS (Multi-beam Optical Sensor)
  * Turbo molecular pump: Pfeiffer Balzers TPU 240
  * Rotary pump: AEG AMEB 7EY4 R3N1
  * Pressure gauge: MKS Baratron TYPE 127
  * Heater control unit: Eurotherm 2416
  * Generator: TDK-Lambda GEN 150-16
  * Bestec 3'' Carbon-BN sample holder/heater
  * Desktop with kSA MOS software
 
=== Documentation ===

  * MOS manual
  * Eurotherm 2416 manual
  * TDK-Lambda GEN 150-16 manual

=== RMKS ===

  * Age requirement: 18+
  * Laser safety training required (contact Bernd Conrad)

[[mchequip:status|See current status and issues]] \\
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