===== Lassie ===== FIXME A short description of the chamber including the kind of deposition system, the origin and use. * MCh ID no.: 4.1_0.2 * Nickname: * Inventory number: (fill only if known) * Person in charge: === Instrument data === * Built: * No. of targets: * Substrate Bias: * HPPMS compatible: {{ mchequip:lassie.jpeg?nolink&0x350 |Lassie}} === Standard equipment === List of standard equipment used for this device. * equipment 1 * equipment 2 === Documentation === Please write down a short MCh user manual or upload corresponding scans. [[mchequip:status|See current status and issues]] \\ [[mchequip:deposition|Back to the list]]