===== Kybele ===== Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its "sister machine" Jarvis, they are the largest and most versatile lab deposition machines and, thus, the "working horses" at MCh. * MCh ID no.: 4.1_01 * Nickname: Kybele * Inventory number: (fill only if known) * Person in charge: Clio Azina, Stanislav Mráz === Instrument data === * Built: 2002 * No. of targets: 4 * Substrate bias: yes * HPPMS compatible: yes === Standard equipment === * MELEC pulse generators * Mass energy analyzer * SURFACE sample holder/heater === Documentation === Please write down a short MCh user manual or upload corresponding scans. FIXME\\ MCh User manual\\ Cathode user manuals [[mchequip:status|See current status and issues]] \\ [[mchequip:deposition|Back to the list]]