====== Instruction to create a wiki - article for deposition chambers ======

Please use the following structure to describe the deposition chamber, which you are responsible for. To copy and paste click the "Edit"- Button. Then you have access to the template.

===== Name of the chamber =====

Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points.

  * MCh ID no.: 
  * Nickname: 
  * Person in charge: 

===== Machine data =====

  * Built: 
  * No. of targets: 
  * Substrate Bias: 
  * HPPMS compatible: 

===== Standard equipment =====

Please list here the standard equipment used for this device. The given example below is made for Kybele.

  * MELEC Pulse Generators
  * Mass Energy Analyzer
  * SURFACE Sample holder/heater
  * 

===== Documentation =====

Please write down a short MCh User manual or upload scans.