====== Kybele ======

Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its "sister machine" Jarvis they are the largest and most versatile lab deposition machines and, thus, the "working horses" at MCh.

  * MCh ID no.: 4.1_01
  * Nickname: Kybele
  * Person in charge: Volker Schnabel

===== Machine data =====

  * Built: 2002
  * No. of targets: 4
  * Substrate Bias: yes
  * HPPMS compatible: yes
===== Standard equipment =====

  * MELEC Pulse Generators
  * Mass Energy Analyzer
  * SURFACE Sample holder/heater
  * 

===== Documentation =====

MCh User manual
Cathode user manuals