42

This page is read only. You can view the source, but not change it. Ask your administrator if you think this is wrong.

===== Garfield =====

FIXME

Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a load-lock chamber.

  * MCh ID no.: 03_202_4
  * Nickname: Garfield
  * Inventory number: (fill only if known)
  * Person in charge: Clio Azina

=== Machine data ===

  * Built:
  * No. of targets: 3
  * Substrate bias: yes
  * HPPMS compatible: yes

{{ mchequip:garfield.jpeg?nolink&0x350 |Garfield}}

=== Standard equipment ===

  * __Main chamber:__
    * Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
    * Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361
  * __Load-lock chamber:__
    * Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
    * Turbomolecular pump: Pfeiffer Vacuum TPU 240

=== Documentation ===

Please write down a short MCh user manual or upload corresponding scans.

[[mchequip:status|See current status and issues]] \\
[[mchequip:deposition|Back to the list]]