mchequip:4.2_02
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mchequip:4.2_02 [2024/07/15 10:17] – created fecik | mchequip:4.2_02 [2024/09/03 15:43] (current) – fecik | ||
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- | * MCh ID no.: 4.3_02 | ||
- | * Nickname: Zeus | ||
- | * Person in charge: Marcus Hans | ||
Zeus represents the industrial Oerlikon Balzers INGENIA p3e cathodic arc batch coating system at MCh and p3e is the abbreviation for pulse enhanced electron emission. The machine is equipped with six cathodes and two ion sources at different positions in the 60x60x70 cm vacuum chamber. | Zeus represents the industrial Oerlikon Balzers INGENIA p3e cathodic arc batch coating system at MCh and p3e is the abbreviation for pulse enhanced electron emission. The machine is equipped with six cathodes and two ion sources at different positions in the 60x60x70 cm vacuum chamber. | ||
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* Each target is evaporated with one power supply and substrate bias (DC, unipolar, bipolar) is used for ion bombardment. | * Each target is evaporated with one power supply and substrate bias (DC, unipolar, bipolar) is used for ion bombardment. | ||
+ | ---- | ||
+ | |||
+ | * MCh ID no.: 4.2_02 | ||
+ | * Nickname: Zeus (Ingenia) | ||
+ | * Inventory number: (fill only if known) | ||
+ | * Person in charge: Marcus Hans | ||
=== Machine data === | === Machine data === | ||
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* Installed: 2013 | * Installed: 2013 | ||
* No. of targets: 6 | * No. of targets: 6 | ||
- | * Substrate | + | * Substrate |
+ | * HPPMS compatible: | ||
+ | |||
+ | {{ mchequip: | ||
+ | |||
+ | === Standard equipment === | ||
+ | |||
+ | * equipment 1 | ||
+ | * equipment 2 | ||
=== Documentation === | === Documentation === | ||
- | Ingenia User Manual | + | {{mchequip: |
- | https:// | + | {{mchequip:sparepartscatalog.pdf|Spare Parts Catalog}} |
- | Spare Parts Catalog | + | |
- | https:// | + | |
+ | [[mchequip: | ||
[[mchequip: | [[mchequip: |
mchequip/4.2_02.1721031453.txt.gz · Last modified: 2024/07/15 10:17 by fecik