mchequip:4.2_01
Differences
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mchequip:4.2_01 [2024/09/03 12:03] – fecik | mchequip:4.2_01 [2024/09/03 15:31] (current) – fecik | ||
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- | ===== Template: Name of the chamber | + | ===== Thor ===== |
FIXME | FIXME | ||
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Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points. | Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points. | ||
- | * MCh ID no.: | + | * MCh ID no.: 4.2_01 |
- | * Nickname: | + | * Nickname: |
- | * Person in charge: | + | * Inventory number: (fill only if known) |
+ | * Person in charge: | ||
=== Machine data === | === Machine data === | ||
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* Built: | * Built: | ||
* No. of targets: | * No. of targets: | ||
- | * Substrate | + | * Substrate |
* HPPMS compatible: | * HPPMS compatible: | ||
- | === Standard equipment === | + | {{ mchequip: |
- | Please list here the standard | + | === Standard |
- | * MELEC Pulse Generators | + | * equipment 1 |
- | * Mass Energy Analyzer | + | * equipment 2 |
- | * SURFACE Sample holder/ | + | |
- | * | + | |
=== Documentation === | === Documentation === |
mchequip/4.2_01.1725357791.txt.gz · Last modified: 2024/09/03 12:03 by fecik