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mchequip:4.1_07 [2024/09/03 12:02] – fecikmchequip:4.1_07 [2024/09/03 15:19] (current) – fecik
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 FIXME FIXME
  
-Jarvis is a self-manufactured PVD system designed for the synthesis of thickness graded multilayer thin films. The most unique features are the fast acting target shutter. An actuation time (from open to close or from close to open) of 200ms enables the synthesis of thin multilayers down to monolayer thicknesses. Two of the targets are aligned 45° relative to the substrate normal, which enables the growth of thickness graded films. The third target is aligned head on to the substrate. The main chamber is equipped with a self-build lamp heater, which is mounted on a former 2’’ Besteck substrate manipulator. A load lock system allows for efficient, clean and high throughput synthesis.  +Jarvis is a self-manufactured PVD system designed for the synthesis of thickness graded multilayer thin films. The most unique features are the fast acting target shutter. An actuation time (from open to close or from close to open) of 200 ms enables the synthesis of thin multilayers down to monolayer thicknesses. Two of the targets are aligned 45° relative to the substrate normal, which enables the growth of thickness graded films. The third target is aligned head on to the substrate. The main chamber is equipped with a self-build lamp heater, which is mounted on a former 2’’ Besteck substrate manipulator. A load lock system allows for efficient, clean and high throughput synthesis.  
  
   * MCh ID no.: 4.1_07   * MCh ID no.: 4.1_07
   * Nickname: Jarvis   * Nickname: Jarvis
-  * Person in charge (1st): Friederike Wittmers +  * Inventory number: (fill only if known) 
-  * Person in charge (2nd): Seyedmohammad Shayestehaminzadeh+  * Person in charge: Eva Mayer, Sameer Salman
  
 === Machine data === === Machine data ===
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   * Built: 2015   * Built: 2015
   * No. of targets: 3   * No. of targets: 3
-  * Substrate Bias: yes+  * Substrate bias: yes
   * HPPMS compatible: yes   * HPPMS compatible: yes
 +
 +{{ mchequip:jarvis.jpeg?nolink&0x350 |Jarvis}}
  
 === Standard equipment === === Standard equipment ===
  
-  * Old Attis chamber as a load lock system+  * Old Attis chamber as a load-lock system
   * Shutter MBE   * Shutter MBE
   * Self-build lamp heater (intended max T=1000°C)   * Self-build lamp heater (intended max T=1000°C)
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   * compatible with MELEC Pulse Generators    * compatible with MELEC Pulse Generators 
   * compatible with PMP1 generators from Kybele   * compatible with PMP1 generators from Kybele
-  * Main chamber Turbovac 350i Qerlikon Leybold +  * __Main chamber:__ 
-  * Main chamber Trivac D4B Oerlikon Leybold +    * Turbovac 350i Qerlikon Leybold 
-  * Load lock Turbovac 151 Oerlikon Leybold +    * Trivac D4B Oerlikon Leybold 
-  * Load lock Ilmvac P6Z+  * __Load-lock:__ 
 +    * Turbovac 151 Oerlikon Leybold 
 +    * Ilmvac P6Z
   * Main chamber and load lock cold cathode PTR 90 Oerlikon Leybold   * Main chamber and load lock cold cathode PTR 90 Oerlikon Leybold
   * Main chamber capacitance pressure gauge CTR 101 range 0.1 Torr Oerlikon Leybold   * Main chamber capacitance pressure gauge CTR 101 range 0.1 Torr Oerlikon Leybold
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 === Documentation === === Documentation ===
  
-Shutter documentation… +  * __Shutter documentation:__ 
- +    * {{mchequip:shutter_control_unit_scu_24v_2102875.pdf|SCU 24V-2102875}} 
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:shutter_control_unit_scu_24v_2102875.pdf +    * {{mchequip:shutter_control_unit_scu_24v_2102975.pdf|SCU 24V-2102975}} 
- +    * {{mchequip:shutter_drive_unit.pdf|Linear Soft-Acting Shutter Drive Unit 100 mm travel}} 
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:shutter_control_unit_scu_24v_2102975.pdf +  * Heater documentation - N/A ((https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:heater_documentation.pdf)) 
- +  * Magnetron drawings version No. ? - N/A ((https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:magnetron_drawings.pdf)) 
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:shutter_drive_unit.pdf +  * Transfer rod drawings version No. ? - N/A ((https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:transfer_rod_drawings.pdf)) 
- +  * {{mchequip:chamber_quality_assessment.pdf|Chamber drawings}} 
-Heater documentation… +  * __Pumps:__ 
- +    * {{mchequip:rotary_vane_vacuum_pump_operating_instructions.pdf|Oerlikon Leybold TRIVAC B D4B/D8B}} 
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:heater_documentation.pdf +    * {{mchequip:drehschieber_vakuumpumpe_ersatzteilliste.pdf|Oerlikon Leybold TRIVAC D 4/8 B}} 
- +    * {{mchequip:turbo_control_300_700_gebrauchsanleitung.pdf|Oerlikon Leybold TURBO.CONTROL 300/700}} 
-Magnetron drawings version No…. +    * {{mchequip:turbovac_gebrauchsanleitung.pdf|Oerlikon Leybold TURBOVAC 350/450 i (DE)}} 
- +    * {{mchequip:turbovac_operating_instructions.pdf|Oerlikon Leybold TURBOVAC 350/450 i (EN)}}
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:magnetron_drawings.pdf +
- +
-Transfer rod drawings version No…. +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:transfer_rod_drawings.pdf +
- +
-Chamber drawings +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:chamber_quality_assessment.pdf +
- +
-Pumps… +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:rotary_vane_vacuum_pump_operating_instructions.pdf +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:drehschieber_vakuumpumpe_ersatzteilliste.pdf +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:turbo_control_300_700_gebrauchsanleitung.pdf +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:turbovac_gebrauchsanleitung.pdf +
- +
-https://134.130.64.55/dokuwiki/lib/exe/fetch.php?media=blog:turbovac_operating_instructions.pdf+
  
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mchequip/4.1_07.1725357773.txt.gz · Last modified: 2024/09/03 12:02 by fecik