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mchequip:4.1_06

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mchequip:4.1_06 [2024/09/03 14:43] fecikmchequip:4.1_06 [2024/09/03 14:49] (current) fecik
Line 21: Line 21:
 === Standard equipment === === Standard equipment ===
  
-  * __Deposition chamber:__+  * __Main chamber:__
     * Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B     * Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
     * Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361     * Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361
mchequip/4.1_06.1725367433.txt.gz · Last modified: 2024/09/03 14:43 by fecik