mchequip:4.1_06
Differences
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mchequip:4.1_06 [2024/09/03 14:43] – fecik | mchequip:4.1_06 [2024/09/03 14:49] (current) – fecik | ||
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=== Standard equipment === | === Standard equipment === | ||
- | * __Deposition | + | * __Main |
* Rotary-vane: | * Rotary-vane: | ||
* Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361 | * Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361 |
mchequip/4.1_06.1725367433.txt.gz · Last modified: 2024/09/03 14:43 by fecik