Differences

This shows you the differences between two versions of the page.

--- mchequip:4.1_06 [2024/07/15 10:14] – created fecik
+++ mchequip:4.1_06 [2024/09/03 14:49] (current) – fecik
@@ Line 3: / Line 3: @@
 FIXME
-Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber.
+Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a load-lock chamber.
-\\
-\\
+  * MCh ID no.: 03_202_4
-MCh ID no.: 03_202_4\\
+  * Nickname: Garfield
-Nickname: Garfield\\
+  * Inventory number: (fill only if known)
-Person in charge: Bastian Stelzer\\
+  * Person in charge: Clio Azina
-\\
 === Machine data ===
-\\
-Built: ...\\
+  * Built:
-Max no. of targets: 3\\
+  * No. of targets: 3
-Substrate Bias: yes\\
+  * Substrate bias: yes
-HPPMS compatible: yes\\
+  * HPPMS compatible: yes
-\\
+{{ mchequip:garfield.jpeg?nolink&0x350 |Garfield}}
 === Standard equipment ===
-\\
-\\
+  * __Main chamber:__
-Main Chamber Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)\\
+    * Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
-Main Chamber Turbomolecular pump (Qerlikon Leybold Turbovac TMP 361 )\\
+    * Turbomolecular pump: Qerlikon Leybold Turbovac TMP 361
-Load Lock Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)\\
+  * __Load-lock chamber:__
-Load Lock Turbomolecular pump (Pfeiffer Vacuum TPU 240)\\
+    * Rotary-vane: Pfeiffer Vacuum Typ DU0 016 B
-\\
+    * Turbomolecular pump: Pfeiffer Vacuum TPU 240
 === Documentation ===
-\\
-**MCh User manual Cathode user manuals**
+Please write down a short MCh user manual or upload corresponding scans.
+[[mchequip:status|See current status and issues]] \\
 [[mchequip:deposition|Back to the list]]