mchequip:4.1_02
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mchequip:4.1_02 [2024/09/03 12:02] – fecik | mchequip:4.1_02 [2024/09/03 14:19] (current) – fecik | ||
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FIXME | FIXME | ||
- | Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points. | + | A short description of the chamber including the kind of deposition system, |
+ | the origin and use. | ||
- | * MCh ID no.: | + | * MCh ID no.: 4.1_0.2 |
- | * Nickname: | + | * Nickname: |
- | * Person in charge: | + | * Inventory number: (fill only if known) |
+ | * Person in charge: | ||
- | === Machine | + | === Instrument |
- | * Built: | + | * Built: |
- | * No. of targets: | + | * No. of targets: |
- | * Substrate Bias: | + | * Substrate Bias: |
- | * HPPMS compatible: | + | * HPPMS compatible: |
+ | |||
+ | {{ mchequip: | ||
=== Standard equipment === | === Standard equipment === | ||
- | Please list here the standard equipment used for this device. The given example below is made for Kybele. | + | List of standard equipment used for this device. |
- | * MELEC Pulse Generators | + | * equipment 1 |
- | * Mass Energy Analyzer | + | * equipment 2 |
- | * SURFACE Sample holder/ | + | |
- | * | + | |
=== Documentation === | === Documentation === | ||
- | Please write down a short MCh User manual or upload scans. | + | Please write down a short MCh user manual or upload |
[[mchequip: | [[mchequip: | ||
[[mchequip: | [[mchequip: |
mchequip/4.1_02.1725357722.txt.gz · Last modified: 2024/09/03 12:02 by fecik