mchequip:4.1_01
Differences
This shows you the differences between two versions of the page.
Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
mchequip:4.1_01 [2024/08/05 15:38] – fecik | mchequip:4.1_01 [2024/09/03 14:22] (current) – fecik | ||
---|---|---|---|
Line 1: | Line 1: | ||
===== Kybele ===== | ===== Kybele ===== | ||
- | Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its " | + | Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its " |
* MCh ID no.: 4.1_01 | * MCh ID no.: 4.1_01 | ||
* Nickname: Kybele | * Nickname: Kybele | ||
- | * Inventory number: | + | * Inventory number: |
* Person in charge: Clio Azina, Stanislav Mráz | * Person in charge: Clio Azina, Stanislav Mráz | ||
- | === Machine | + | === Instrument |
* Built: 2002 | * Built: 2002 | ||
* No. of targets: 4 | * No. of targets: 4 | ||
- | * Substrate | + | * Substrate |
* HPPMS compatible: yes | * HPPMS compatible: yes | ||
=== Standard equipment === | === Standard equipment === | ||
- | * MELEC Pulse Generators | + | * MELEC pulse generators |
- | * Mass Energy Analyzer | + | * Mass energy analyzer |
- | * SURFACE | + | * SURFACE |
=== Documentation === | === Documentation === | ||
+ | Please write down a short MCh user manual or upload corresponding scans. | ||
+ | |||
FIXME\\ | FIXME\\ | ||
MCh User manual\\ | MCh User manual\\ | ||
Cathode user manuals | Cathode user manuals | ||
+ | [[mchequip: | ||
[[mchequip: | [[mchequip: |
mchequip/4.1_01.1722865116.txt.gz · Last modified: 2024/08/05 15:38 by fecik