blog:4.1_06
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| - | ===== Garfield ===== | ||
| - | FIXME | ||
| - | |||
| - | Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber. | ||
| - | \\ | ||
| - | \\ | ||
| - | MCh ID no.: 03_202_4\\ | ||
| - | Nickname: Garfield\\ | ||
| - | Person in charge: Bastian Stelzer\\ | ||
| - | \\ | ||
| - | === Machine data === | ||
| - | \\ | ||
| - | Built: ...\\ | ||
| - | Max no. of targets: 3\\ | ||
| - | Substrate Bias: yes\\ | ||
| - | HPPMS compatible: yes\\ | ||
| - | \\ | ||
| - | === Standard equipment === | ||
| - | \\ | ||
| - | \\ | ||
| - | Main Chamber Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)\\ | ||
| - | Main Chamber Turbomolecular pump (Qerlikon Leybold Turbovac TMP 361 )\\ | ||
| - | Load Lock Rotary-vane (Pfeiffer Vacuum Typ DU0 016 B)\\ | ||
| - | Load Lock Turbomolecular pump (Pfeiffer Vacuum TPU 240)\\ | ||
| - | \\ | ||
| - | === Documentation === | ||
| - | \\ | ||
| - | **MCh User manual Cathode user manuals** | ||
| - | |||
| - | [[blog: | ||
blog/4.1_06.1716289791.txt.gz · Last modified: 2024/05/21 13:09 by fecik