blog:4.1_06
Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| blog:4.1_06 [2016/01/27 13:33] – achenbach | blog:4.1_06 [2024/07/15 10:15] (current) – removed fecik | ||
|---|---|---|---|
| Line 1: | Line 1: | ||
| - | ===== Garfield ===== | ||
| - | Garfield is a self-manufactured PVD system consisting of two parts, a deposition and a loadlock chamber. | ||
| - | \\ | ||
| - | \\ | ||
| - | MCh ID no.: | ||
| - | Nickname: Garfield\\ | ||
| - | Person in charge: Jan-Ole Achenbach\\ | ||
| - | \\ | ||
| - | ==== Machine data ==== | ||
| - | \\ | ||
| - | Built: ...\\ | ||
| - | Max no. of targets: 3\\ | ||
| - | Substrate Bias: yes\\ | ||
| - | HPPMS compatible: yes\\ | ||
| - | \\ | ||
| - | ==== Standard equipment ==== | ||
| - | \\ | ||
| - | \\ | ||
| - | Load Lock | ||
| - | Load Lock Turbomolecular pump (Pfeiffer Vacuum TPU 240)\\ | ||
| - | \\ | ||
| - | ==== Documentation ==== | ||
| - | \\ | ||
| - | **MCh User manual Cathode user manuals** | ||
blog/4.1_06.1453897997.txt.gz · Last modified: 2016/01/27 11:33 (external edit)