blog:4.1_06
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| - | Garfield is a self-manufactured PVD system consisting of two parts, a deposition and chamber and a loadlock. | ||
| - | MCh ID no.: | ||
| - | Nickname: Garfield | ||
| - | Person in charge: Jan-Ole Achenbach | ||
| - | |||
| - | **Machine data** | ||
| - | |||
| - | Built: ... | ||
| - | Max no. of targets: 3 | ||
| - | Substrate Bias: yes | ||
| - | HPPMS compatible: yes | ||
| - | |||
| - | **Standard equipment** | ||
| - | |||
| - | MELEC Pulse Generators | ||
| - | SURFACE Sample holder/ | ||
| - | |||
| - | |||
| - | Documentation | ||
| - | |||
| - | **MCh User manual Cathode user manuals** | ||
blog/4.1_06.1452163787.txt.gz · Last modified: 2016/01/07 09:49 (external edit)