blog:4.1_05
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| - | ===== Flipper ===== | ||
| - | FIXME | ||
| - | |||
| - | Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross. | ||
| - | \\ | ||
| - | \\ | ||
| - | MCh ID no.: 03_202_3\\ | ||
| - | Nickname: Flipper\\ | ||
| - | Person in charge: Jan-Ole Achenbach\\ | ||
| - | \\ | ||
| - | === Machine data === | ||
| - | \\ | ||
| - | Built: ...\\ | ||
| - | Max no. of targets: 2\\ | ||
| - | Substrate Bias: yes\\ | ||
| - | HPPMS compatible: yes\\ | ||
| - | \\ | ||
| - | === Standard equipment === | ||
| - | \\ | ||
| - | Rotary-vane (Edwards E2M28)\\ | ||
| - | Turbomolecular punm (Pfeiffer Vacuum TPU 240)\\ | ||
| - | \\ | ||
| - | === Documentation === | ||
| - | \\ | ||
| - | **MCh User manual Cathode user manuals** | ||
| - | |||
| - | [[blog: | ||
blog/4.1_05.1716289714.txt.gz · Last modified: 2024/05/21 13:08 by fecik