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blog:4.1_05 [2016/01/27 13:47] achenbachblog:4.1_05 [2024/07/15 10:14] (current) – removed fecik
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-===== Flipper ===== +
-Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross. +
-\\ +
-\\ +
-MCh ID no.: 03_202_3\\  +
-Nickname: Flipper\\ +
-Person in charge: Jan-Ole Achenbach\\ +
-\\ +
-==== Machine data ==== +
-\\ +
-Built: ...\\ +
-Max no. of targets: 2\\ +
-Substrate Bias: yes\\ +
-HPPMS compatible: yes\\ +
-\\ +
-==== Standard equipment ==== +
-\\ +
-Rotary-vane (Edwards E2M28)\\ +
-Turbomolecular punm (Pfeiffer Vacuum TPU 240)\\ +
-\\ +
-==== Documentation ==== +
-\\ +
-**MCh User manual Cathode user manuals**+
blog/4.1_05.1453898837.txt.gz · Last modified: 2016/01/27 11:47 (external edit)