blog:4.1_05
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blog:4.1_05 [2016/01/27 13:47] – achenbach | blog:4.1_05 [2024/07/15 10:14] (current) – removed fecik | ||
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- | ===== Flipper ===== | + | |
- | Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross. | + | |
- | \\ | + | |
- | \\ | + | |
- | MCh ID no.: 03_202_3\\ | + | |
- | Nickname: Flipper\\ | + | |
- | Person in charge: Jan-Ole Achenbach\\ | + | |
- | \\ | + | |
- | ==== Machine data ==== | + | |
- | \\ | + | |
- | Built: ...\\ | + | |
- | Max no. of targets: 2\\ | + | |
- | Substrate Bias: yes\\ | + | |
- | HPPMS compatible: yes\\ | + | |
- | \\ | + | |
- | ==== Standard equipment ==== | + | |
- | \\ | + | |
- | Rotary-vane (Edwards E2M28)\\ | + | |
- | Turbomolecular punm (Pfeiffer Vacuum TPU 240)\\ | + | |
- | \\ | + | |
- | ==== Documentation ==== | + | |
- | \\ | + | |
- | **MCh User manual Cathode user manuals** | + |
blog/4.1_05.1453898837.txt.gz · Last modified: 2016/01/27 11:47 (external edit)