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blog:4.1_05 [2016/01/14 08:10] – created achenbachblog:4.1_05 [2024/07/15 10:14] (current) – removed fecik
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-Flipper is a self-manufactured high vacuum chamber assembled from a DN160 six way cross. +
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-MCh ID no.:\\  +
-Nickname: Flipper\\ +
-Person in charge: Jan-Ole Achenbach\\ +
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-**Machine data**\\ +
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-Built: ...\\ +
-Max no. of targets: 2\\ +
-Substrate Bias: yes\\ +
-HPPMS compatible: yes\\ +
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-**Standard equipment**\\ +
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-Rotary-vane (Edwards E2M28)\\ +
-Turbomolecular punm (Pfeiffer Vacuum TPU 240)\\ +
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-Documentation\\ +
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-**MCh User manual Cathode user manuals**+
blog/4.1_05.1452755403.txt.gz · Last modified: 2016/01/14 06:10 (external edit)