blog:4.1_04
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| blog:4.1_04 [2024/05/21 13:07] – fecik | blog:4.1_04 [2024/07/15 10:14] (current) – removed fecik | ||
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| - | ===== Nike ===== | ||
| - | FIXME | ||
| - | |||
| - | Nike is a thin film stress measurement system with multi-beam optical sensor using wafer curvature method. Both //in-situ// (vacuum annealing) and //ex-situ// (room temperature) operation possible. | ||
| - | |||
| - | * MCh ID no.: 03_202_02 | ||
| - | * Nickname: Nike (the Winged Goddess of Victory) | ||
| - | * Person in charge: Philipp Keuter | ||
| - | |||
| - | === Machine data === | ||
| - | |||
| - | * Built: 2010 | ||
| - | * Last modified: 2015 | ||
| - | * possible to transform to deposition chamber | ||
| - | * MOS independently detachable - possible to adopt to other deposition chambers | ||
| - | |||
| - | === Standard equipment === | ||
| - | |||
| - | * kSA MOS (Multi-beam Optical Sensor) | ||
| - | * Turbo molecular pump: Pfeiffer Balzers TPU 240 | ||
| - | * Rotary pump: AEG AMEB 7EY4 R3N1 | ||
| - | * Pressure gauge: MKS Baratron TYPE 127 | ||
| - | * Heater control unit: Eurotherm 2416 | ||
| - | * Generator: TDK-Lambda GEN 150-16 | ||
| - | * Bestec 3'' | ||
| - | * Desktop with kSA MOS software | ||
| - | |||
| - | === Documentation === | ||
| - | |||
| - | * MOS manual | ||
| - | * Eurotherm 2416 manual | ||
| - | * TDK-Lambda GEN 150-16 manual | ||
| - | |||
| - | === RMKS === | ||
| - | |||
| - | * Age requirement: | ||
| - | * Laser safety training required (Contact: Bernd Conrad) | ||
| - | |||
| - | [[blog: | ||
blog/4.1_04.1716289633.txt.gz · Last modified: 2024/05/21 13:07 by fecik