blog:4.1_02
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| - | === Lassie === | ||
| - | FIXME | ||
| - | |||
| - | Please give a short description of the chamber including the kind of deposition system, the origin and use. You may also fill out the following bullet points. | ||
| - | |||
| - | * MCh ID no.: | ||
| - | * Nickname: | ||
| - | * Person in charge: | ||
| - | |||
| - | === Machine data === | ||
| - | |||
| - | * Built: | ||
| - | * No. of targets: | ||
| - | * Substrate Bias: | ||
| - | * HPPMS compatible: | ||
| - | |||
| - | === Standard equipment === | ||
| - | |||
| - | Please list here the standard equipment used for this device. The given example below is made for Kybele. | ||
| - | |||
| - | * MELEC Pulse Generators | ||
| - | * Mass Energy Analyzer | ||
| - | * SURFACE Sample holder/ | ||
| - | * | ||
| - | |||
| - | === Documentation === | ||
| - | |||
| - | Please write down a short MCh User manual or upload scans. | ||
| - | |||
| - | [[blog: | ||
blog/4.1_02.1716289375.txt.gz · Last modified: 2024/05/21 13:02 by fecik