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--- blog:4.1_01 [2017/12/21 11:15] – external edit (Unknown date) 127.0.0.1
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-====== Kybele ======
-Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its "sister machine" Jarvis they are the largest and most versatile lab deposition machines and, thus, the "working horses" at MCh.
-  * MCh ID no.: 4.1_01
-  * Nickname: Kybele
-  * Inventory number:
-  * Person in charge: Simon Evertz
-===== Machine data =====
-  * Built: 2002
-  * No. of targets: 4
-  * Substrate Bias: yes
-  * HPPMS compatible: yes
-===== Standard equipment =====
-  * MELEC Pulse Generators
-  * Mass Energy Analyzer
-  * SURFACE Sample holder/heater
-===== Documentation =====
-MCh User manual
-Cathode user manuals