blog:4.1_01
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| - | ====== Kybele ====== | ||
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| - | Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its " | ||
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| - | * MCh ID no.: 4.1_01 | ||
| - | * Nickname: Kybele | ||
| - | * Person in charge: Volker Schnabel | ||
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| - | ===== Machine data ===== | ||
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| - | * Built: 2002 | ||
| - | * No. of targets: 4 | ||
| - | * Substrate Bias: yes | ||
| - | * HPPMS compatible: yes | ||
| - | ===== Standard equipment ===== | ||
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| - | MELEC Pulse Generators | ||
| - | Mass Energy Analyzer | ||
| - | SURFACE Sample holder/ | ||
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| - | ===== Documentation ===== | ||
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| - | MCh User manual | ||
| - | Cathode user manuals | ||
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blog/4.1_01.1446712855.txt.gz · Last modified: 2015/11/05 07:40 (external edit)