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--- blog:4.1_01 [2015/11/05 09:40] – created 134.130.64.101
+++ blog:4.1_01 [2024/07/15 10:11] (current) – removed fecik
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-====== Kybele ======
-Kybele is a self-manufactured PVD system initially financed from Jochen Schneider´s Sofia Kovalevskaya Award funds. Together with its "sister machine" Jarvis they are the largest and most versatile lab deposition machines and, thus, the "working horses" at MCh.
-  * MCh ID no.: 4.1_01
-  * Nickname: Kybele
-  * Person in charge: Volker Schnabel
-===== Machine data =====
-Built: 2002
-No. of targets: 4
-Substrate Bias: yes
-HPPMS compatible: yes
-===== Standard equipment =====
-MELEC Pulse Generators
-Mass Energy Analyzer
-SURFACE Sample holder/heater
-===== Documentation =====
-MCh User manual
-Cathode user manuals